TM-3000, Micrómetro Óptico 2D

TM-3000, Micrómetro Óptico de 2 dimensiones de alta velocidad y precisión de Keyence

  1. Josep Valcarce
    TM-3000,
    Micrómetro Óptico de 2 dimensiones de alta velocidad y precisión de Keyence
    Transcript Header:
    TM-3000, Micrómetro Óptico 2D
    Transcript Body:
    • 1. 2 DIMENSIONALMULTI-POINT OUTER DIAMETERMeasurement Guide
    • 2. Problems with Conventional Measuring MethodsIt is generally understood that non-contact outer diameter measurement should be done with one-dimensional,thrubeam type laser scan micrometers.As product accuracy improves and the inspection standards become more rigorous and versatile, conventional methodsof measurement are becoming increasingly less able to perform the required inspections.Moreover, laser scan type measurement raises concerns about accuracy related to target positioning and durability,given that it uses motors and a laser.Now KEYENCE proposes a non-contact, two-dimensional outer diameter measurement instrument which will satisfyboth of these needs. Measuring the outer diameter of an inclined target CO N V EN T I O N A L M E T H O D • The target is fixed with a jig for measurement. PROBLEM • It is difficult to distinguish whether the detected error was caused by the inclination or by the target itself. Measuring the outer diameter of a target with a rough surface CO N V EN T I O N A L M E T H O D • The target is fixed with a jig and the outer diameter is measured at one point. PROBLEM • The measured value greatly varies depending on the measurement point due to surface roughness. • If the stage is unstable, the accuracy decreases. Measuring the outer diameter at multiple points at narrow intervals CO N V EN T I O N A L M E T H O D • The target is scanned while the target or sensor head is moved and the result is calculated with an external device. • The target position is changed and the outer diameter is measured at each point. Multiple heads are required. PROBLEM • If the stage is unstable, the accuracy decreases and more time is required. • When the target position is changed an error may occur depending on the position. • Using multiple heads increases the cost. 2
    • 3. Measuring the runout at multiple points of a rotating target CO N V EN T I O N A L M E T H O D• The sensor head is moved to each point to perform discrete measurements. PROBLEM• Simultaneous measurement is impossible.• Some kind of movement mechanism is required.• The time required can be expressed as: Number of measurement points x Rotation time.Measuring the outer diameter at a fixed point CO N V EN T I O N A L M E T H O D• The target is pressed against a hard stop for measurement.• The target is scanned while the target or sensor head is moved and the movement is controlled with an external device. PROBLEM• Error can occur due to mounting variations. 20 mm• The scanning requires time.Measuring the height difference of a stepped target CO N V EN T I O N A L M E T H O D• The target is scanned while the target or sensor head is moved and the result is calculated with an external device. PROBLEM• If the stage is unstable, the accuracy decreases and more time is required.• If the target inclines, the measured value becomes larger.Measuring the maximum/minimum outer diameter CO N V EN T I O N A L M E T H O D• The target is scanned while the target or sensor head is moved and the result is calculated with an external device. PROBLEM• If the stage inclines, the accuracy decreases and more time is required.• The scanning requires some time. 3
    • 4. Features of the 2D Micrometer TM-3000 SeriesThe optical system using a Green LED, and telecentric lenses apply uniform LED light onto the target.This light projects an image on the 2D CMOS and the edges between the light and dark areas are detected to allowmeasurement at multiple points. Moreover, the motor-less structure and longer life light source provide high durability. Structure Principle telecentric receiving lens Light transmitting lens Mirror Mirror Target Lens Lens Diffusion unit Receiver Transmitter CMOS LED PRI N CI PL ES O F T H E CO N V EN T I O N A L L AS ER S C A N T YPE Structure Principle Light-receiving element Light receiving lens Collimator lens (FѲ lens) A semiconductor laser beam is applied Light-receiving element Reflecting onto a polygon mirror which is rotated mirror by a motor to scan the measuring range. Motor Semiconductor The time in which the laser beam is Target laser Edge detection interrupted by the target is measured to Polygon mirror Motor Polygon mirror obtain the dimension of the target. Receiver Light-receiving Transmitter element (for synchronization) 4
    • 5. FU LL I M AGE M E ASU REM ENT TM-3000 Series CONVE NT IONAL LASE R SCAN T YP E 2D measurement captures all of With the laser scan type, the measurement the target information at once. The point is only one dimensional. It is impossible to measure multiple points simultaneously or to measurement is based on the 2D correct target inclination. silhouette image projected on the CMOS. This allows measurement at desired points or measurement with position correction, which is possible only by using 2D images. Only one point can be measured.CA M ER A M E TH O D WITH O U T A SCANN I N G L ASER TM-3000 Series CONVE NT IONAL LASE R SCAN T YP E The 2D method allows measurement of the The path of the laser scan varies with every entire range in one instant. sampling due to the surface accuracy of the polygon mirror. The laser scan type is also Since no scanning laser is used, a affected by inconsistent motor rotation which specified point can be measured exactly. increases over time. The longer the instrument is used, the greater the inconsistency of the laser scan path becomes. Scanning directionH I GH D U R AB I LIT Y TM-3000 Series CONVE NT IONAL LASE R SCAN T YP E ■ Enlarged view of the transmitter No motorized mechanism The driving mechanism decreases durability and of the TM 3000 Series A system with no moving parts provides requires maintenance. There is also a concern Light transmitting lens about laser deterioration due to electrical noise. higher durability. This eliminates the Mirror problem of motor durability which has ■ Enlarged view of the transmitter of the been a disadvantage of laser scan type laser scan type Reflecting mirror micrometers. Lens Ultra long life LED The GaN (Gallium Nitride) LED used as a Diffusion unit light source has achieved high reliability without being affected by light source Polygon mirror LED deterioration due to electrical noise. 5
    • 6. 2D Applications for Multi-Point MeasurementThe TM-3000 Series provides a wide measuring range indicated by the dimensions shown in the left figure below.When a target is placed in this range, its silhouette can be obtained as shown in the right figure below. Specify adesired point on the silhouette to obtain the measured value of the point. Measuring the outer diameter of a stepped shaft Measurement screen TILT DISTANCE 1 5 Measuring the outer diameter Measuring the outer diameter of an inclined target at a fixed point ➔ See page 7. ➔ See page 9. ROUGHNESS STEP 2 6 Measuring the outer diameter Measuring the height difference of a target with a rough surface of a stepped target ➔ See page 7. ➔ See page 9. 3 NARROW 7 MAX Measuring the outer diameter Measuring the maximum, at multiple points with minimum and outer diameter narrow intervals ➔ See page 8. ➔ See page 10. ECCENTRICITY 4 Measuring the eccentricity at multiple points of a rotating target ➔ See page 8. 6
    • 7. TILT Measuring the outer diameter 1 of an inclined target Θ (Actual application example) Measuring the outer diameter of a catheter TM-3000 Series 10.300 Since the TM-3000 Series measures outer diameter based 10.250 Laser scan type TM-040 on a 2D image, and can provide information on the target Measured value [mm] 10.200 inclination. Based on this information, it can measure outer 10.150 diameters while correcting the inclination automatically. 10.100 10.050 C O N VE N TI ONA L L A S ER S CA N TYPE 10.000 9.950 If the target inclines, the scanned diameter becomes larger 0 5 10 15 20 (The gray curve in the graph on the right), resulting in improper Inclination angle [°] measured values.ROUGHNESS Measuring the outer diameter of a target 2 with a rough surface (Actual application example) TM-3000 Series Measuring the outer diameter of a copy roller Copy roller scan data An area is defined based on the captured image. Calculating the average of the diameters within the area Laser scan type Measured value [5 μm/div] TM-040 (average of 100 lines) minimizes the error caused by surface roughness during measurement. C O N VE N TI ONA L L A S ER S CA N TYPE When a target with a rough surface was measured, the measured value fluctuated depending on the measurement position, resulting 0 2 4 6 8 10 in greater error. Moving distance [mm] 7
    • 8. NARROW Measuring the outer diameter 3 at multiple points at narrow intervals Narrow intervals TM-3000 Series (Actual application example) Measuring the outer diameter of an injection needle You can obtain measured values by just specifying an area around the target section on the captured image. 2.0 sec./target Cycle Unlike conventional micrometers, the measurement can be Time completed without the troublesome process of changing the target position or preparing a moving mechanism. C O NV ENTIONA L L A S ER S CA N TYPE The only way to measure outer diameters at narrow intervals was 0.035 sec./target either by 1) changing the target position or 2) scanning the target. Measurement took more time and effort, and incurred more costs TM-3000 When laser scan type is used with a linear slide due to jig maintenanceECCENTRICITY Measuring the eccentricity at 4 multiple points of a rotating target (Actual application example) TM-3000 Series Measuring the eccentricity at multiple points of a solenoid valve Just selecting measurement points from the captured data Three-point measurement of eccentricity allows measurement. The measurement of the deviation at multiple points can be perfectly synchronized and Measurement point 1 Measurement point 2 TM-3000 conducted at once, resulting in significant reduction of Measurement point 3 cycle time. Laser scan type Movement Movement C O NV ENTIONA L L A S ER S CA N TYPE time time The time required for the measuring of multiple points was Cycle Time expressed as: Number of measurement points x Rotation time, and also required time to move to the measurement points. Consequently, a 100% inspection was impossible. 8
    • 9. DISTANCE Measuring the outer diameter 5 at a fixed point Reference (Actual application example) Measuring the outer diameter of a drill bit TM-3000 Series The position correction function allows outer diameter Measurement result for a shaft of 10 mm diameter measurement at a fixed distance from a specified point. Measurement 1 Measurement 2 Measurement 3 Measurement 4 Correcting the position displacement or inclination of the TM-3000 10.001 9.999 10.001 10.002 Series target enables quality evaluation on an actual production line. Laser scan 10.004 10.004 10.008 10.120 type Error introduced by the target position  Measurement 5 Measurement 6 Measurement 7 Measurement 8 C O N VEN TI O NA L L A S ER S CA N TYPE TM-3000 10.002 9.998 10.001 10.002 Series Conventional micrometers required the preparation of a special jig Laser scan 10.003 10.002 10.006 10.002 type which aligns the target for measurement. Accurate measurement was difficult because the measured value varied every time due to position variation. STEP Measuring the height difference 6 of a stepped target (Actual application example) TM-3000 Series Measuring the height difference/outer diameter of an injector Effects of inclination can be corrected during measurement PLC’s internal calculation using the result obtained when calculating from 2D data. Both height difference and with a laser scan type outer diameter can be measured with one sampling, allowing inline measurement. Measured value [0.1 mm/div] Height difference to be measured Error introduced by inclination C O N VEN TI O NA L L A S ER S CA N TYPE After the reference point was measured, the target was moved to Data including fluctuation caused by stage instability + Error introduced by inclination measure the point of different height. The system required a moving mechanism which caused problems such as accuracy issues 2.0 sec. and higher cost. In addition, accurate measurement was difficult because the resultant value became larger when the target inclined. Cycle Time 9
    • 10. MAX Measuring the maximum/minimum 7 outer diameter (Actual application example) TM-3000 Series Measuring the outer diameter of an ampule PLC’s internal calculation using the result obtained Measurement is conducted at once using the entire image, with a laser scan type and the maximum diameter can be determined from the result. Since the maximum value can be specified from Data including errors introduced by the inclination of the stage the entire image, measurement is not affected by errors Maximum value Measured value [2 mm/div] resulting from the use of a jig. C O NV ENTIONA L L A S ER S CA N TYPE 2.0 sec. The conventional micrometers scanned the target and then determined the maximum diameter from the scanned data. Cycle Time The measurement took more time, or was not accurate due to the influence of the accuracy of the jig. A PPLI CATI O NThickness measurement of film Measurement of ingot width and notch Simultaneous The sensor can monitoring of the measure the roller and film can be workpiece while performed, which will correcting tilt. In avoid deflection addition, the sensor caused by vibration has deep depth of as well as generate focus and wide no accidental error measurement range, caused by allowing stable installation. measurement.Measurement of deformation volume in materialon tension testing machine Dimension measurement of engine bulb Evaluation can be performed without Multi-point removing samples measurement of outer from the testing dimension can be machine since the performed without deformation volume scanning, which can can be monitored both improve accuracy with force applied. and reduce takt. 10
    • 11. PRO D U CT LI N EU P2D Micrometer TM-3000 SeriesSensor head Controller Large-diameter type TM-065 Measuring range ø65 mm ø2.56" Smallest detectable object 0.5 mm 0.02" Measurement accuracy ±3 μm 0.12 Mil Repeatability ±0.2 μm 0.007 Mil TM-3001 Standard type TM-040 Measuring range ø40 mm ø1.57" Smallest detectable object 0.3 mm 0.01" Measurement accuracy ±2 μm 0.08 Mil Monitor Repeatability ±0.15 μm 0.05 Mil High-precision type TM-006 Measuring range ø6 mm ø0.24" Smallest detectable object 0.04 mm 0.001" Measurement accuracy ±0.5 μm 0.02 Mil Repeatability ±0.06 μm 0.002 Mil CA-MP81High-speed, high-accuracy CCD Micrometer LS-7000 SeriesMeasuring head ControllerHigh accuracy with wide measurement range Large-diameter type Fully compatibleLS-7070M (with monitor function) 65 mmLS-7070 (without monitor function) 2.65" Measuring range 0.5 to 65 mm 0.02" to 2.56" Smallest detectable object 0.5 mm 0.02" Measurement accuracy ±3 μm ±0.12 Mil Repeatability ±0.2 μm ±0.008 MilStandard type achieving both high speed and high accuracy LS-7601 Standard type Fully compatible High-performance controllerLS-7030M (with monitor function) 30 mmLS-7030 (without monitor function) 1.18" Measuring range 0.3 to 30 mm 0.01" to 1.18" Digital switch type Smallest detectable object 0.3 mm 0.01" controller Measurement accuracy ±2 μm ±0.08 Mil also available Repeatability ±0.15 μm ±0.006 Mil LS-7001Further high accuracy for measuring tiny targets Small diameter type Fully compatible 6 mm 0.24"LS-7010M (with monitor function)LS-7010 (without monitor function)Measuring range 0.04 to 6 mm 0.002" to 0.24" Fully compatibleSmallest detectable object 0.04 mm 0.002"Measurement accuracy ±0.5 μm ±0.02 Mil The measuring head and controller can be connected inRepeatability ±0.06 μm ±0.002 Mil any combination regardless of the measuring range or serial number. Reliable operation can be continued even during maintenance, or when the specifications are changed abruptly. 11
    • 12. LASER DISPLACEMENT LK-G5000 Series LASER DISPLACEMENT (2D) LJ-G Series Cylindrical lens Semiconductor laser Vibration test of high-temperature-muffler 2D Ernostar lens Checking the assembly accuracy of an auto body 3 E -CMOS❙ Sampling rate of 392 kHz ❙ High-accuracy of ± 0.1% of F.S.❙ Linearity of ± 0.02% of F.S. ❙ High-speed sampling Thickness measurement/loop❙ Repeatability down to 0.01 µm 0.0004 Mil control of a rubber sheet ❙ Simultaneous measurement/ judgement at 8 points CONFOCAL DISPLACEMENT LT Series SPECTRAL INTERFERENCE SI Series 1nm 0.00004 Mil Best in its Class Resolution Measuring roller run out with Spectrum unit high accuracy Controller Thickness SI-F1000V measurement type SI-F80❙ Surface scanning method for a variety of high Long distance type accuracy measurements Micro-head type SI-F10 Measuring the profile of solder SI-F01❙ Multiple measurement modes paste on a PWB Measuring the thickness of glass discs❙ 0.3 µm 0.01 Mil resolution OPTICAL MEASUREMENT SYSTEM IM Series The IM Series is a one step solution to conventional quality control inspection problems. With the press of a button, KEYENCE’s patented pattern analysis tools provide traceable 2D analysis of any part placed User-friendly basic measurement menu on the measurement stage. With an industry leading 100 nm resolution, the IM Series provides unprecedented solid state measurement in a low cost, green, and space saving package. ❙ Sub-Pixel Measurement Accuracy OK OK NG ❙ Instantaneous Batch Measurements at 99 Points ❙ NO Positioning Necessary ❙ Pattern Registration & Search ❙ Measures in Seconds OK/NG judgments based on the tolerance ❙ Built-In GD&T Tools CALL T O C O N TA C T Y O U R L O C A L O F F I C E TOLL FREE 1-888-KEYENCE 1 - 8 8 8 - 5 3 9 - 3 6 2 3 www.keyence.com SAFETY INFORMATION Please read the instruction manual carefully in order to safely operate any KEYENCE product.KEYENCE CORPORATION OF AMERICACorporate Office 669 River Drive, Suite 403, Elmwood Park, NJ 07407 PHONE: 201-930-0100 FAX: 201-930-0099 E-mail: keyence@keyence.comSales & Marketing Head Office 1100 North Arlington Heights Road, Suite 350, Itasca, IL 60143 PHONE: 888-539-3623 FAX: 630-285-1316 Regional offices CO Denver IN Indianapolis MI Detroit NJ Elmwood Park OH Cincinnati SC Greenville TX DallasAL Birmingham FL Tampa KS Kansas City MI Grand Rapids NY Rochester OH Cleveland TN Knoxville VA RichmondCA N.California GA Atlanta KY Louisville MN Minneapolis NC Charlotte OR Portland TN Nashville WA SeattleCA Los Angeles IL Chicago MA Boston MO St. Louis NC Raleigh PA Philadelphia TX Austin WI MilwaukeeKEYENCE CANADA INC. KEYENCE MEXICO S.A. DE C.V.Head Office PHONE: 905-366-7655 FAX: 905-366-1122 E-mail: keyencecanada@keyence.com PHONE: +52-81-8220-7900 FAX: +52-81-8220-9097Montreal PHONE: 514-694-4740 FAX: 514-694-3206 E-mail: keyencemexico@keyence.comKEYENCE CORPORATION1-3-14, Higashi-Nakajima, Higashi-Yodogawa-ku, Osaka, 533-8555, Japan PHONE: +81-6-6379-2211 KA1-1091The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.Copyright (c) 2011 KEYENCE CORPORATION. All rights reserved. TMReason-KA-TG-E 1111-1 611605 Printed in Japan * 6 1 1 6 0 5 *
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