Micro-electro mechanical systems (MEMS) is a semiconductor integrated circuits (ICs), which combines mechanical and electrical properties of silicon on a single chip. These MEMS are used to detect motions such as angular motion, acceleration, pressure and magnetic field. MEMS also enable computational ability of microelectronic product and control its sensors. Now a days, MEMS have been considered as a revolutionized component used for personal healthcare application. MEMS have played a vital role in the transition of centralized capital hospital equipment into handheld personalized devices. MEMS based medical devices are well-organized and capable to diagnose several medical conditions for example breathing rate, blood pressure, body temperature, motor disorder etc.
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